Apparatus for treating a substrate
US11829070B2 · kind B2 · utility
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10Claims
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Assignee
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Key dates
| Filing date | Dec 21, 2021 |
| Grant date | Nov 28, 2023 |
| Priority date | — |
| Expiry date | Dec 21, 2041 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB05C11/02
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
An apparatus for treating a substrate, the apparatus comprising: a treating container having an inner space; a support unit supporting and rotating the substrate in the inner space; and an exhaust unit exhausting an air flow in the inner space, wherein the treating container includes an outer cup providing the inner space; and an inner cup disposed at the inner space and spaced apart from the outer cup, and wherein the outer cup has a protrusion at a side wall thereof.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.