Variable loop control feature
US11841692B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 16, 2022 |
| Grant date | Dec 12, 2023 |
| Priority date | — |
| Expiry date | Sep 16, 2042 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG05B2219/49023
- WIPO fieldOther special machines
- WIPO sectorMechanical engineering
Abstract
A method includes identifying a recipe for depositing layers on a substrate in a processing chamber of a substrate processing system. The recipe comprises iterations of a set of one or more processes, and wherein each iteration of the iterations is for depositing at least one layer of the layers. The method further includes determining changes to parameters for depositing the at least one layer on the substrate. Each of the changes corresponds to a respective iteration of the iterations and is associated with a relative position of a corresponding layer. The layers are to be deposited on one or more substrates based on the recipe and the changes.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.