Tester and method for calibrating probe card and device under testing (DUT)

US11852657B2 · kind B2 · utility

Assignee

• CHANGXIN MEMORY TECHNOLOGIES, INC. · CN

Inventors

• You-Hsien Lin · New Taipei, TW
• Yung-Shiuan Chen · Taipei, TW
• Tzu-Chia LIU · Hefei, CN
• Hsin-Hsuan Chen · Hefei, CN
• Wei Wang · Zhubei City, TW
• Shan Zhang · Hefei, CN
• Zhenzheng Jiang · Hefei, CN
• Mingxiu Zhong · Hefei, CN

Key dates

• Filing date: May 14, 2021
• Grant date: Dec 26, 2023
• Expiry date: Jun 9, 2042

Classification

• Technology area (CPC G): Physics
• CPC primary: G01R35/005
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A semiconductor tester and a method for calibrating a probe card and a device under testing (DUT) are disclosed. The semiconductor tester includes: a support platform, including a support surface and configured to be able to move along a direction parallel to the support surface and rotate around a rotating shaft perpendicular to the support surface; a probe card including a plurality of probes stretching towards the support platform; and an alignment assembly, including: at least two first laser emitting apparatuses emitting a plurality of first laser beams; and a second laser emitting apparatus emitting a plurality of second laser beams. The first laser beams and the second laser beams are perpendicular to each other and are each arranged sequentially along a direction perpendicular to the support surface. The semiconductor tester aligns a probe card to a DUT with improved accuracy, thereby preventing the damage to the probe card.