In-line monitoring of OLED layer thickness and dopant concentration

US11856833B2 · kind B2 · utility

Assignee

• Applied Materials, Inc. · US

Inventors

• Yeishin Tung · San Jose, US
• Byung Sung Kwak · Portland, US
• Robert Jan Visser · Menlo Park, US
• Guoheng Zhao · Sunnyvale, US
• Todd Egan · Fremont, US
• Dinesh Kabra · Mumbai, IN
• Gangadhar Banappanavar · Mumbai, IN

Key dates

• Filing date: Jan 19, 2021
• Grant date: Dec 26, 2023
• Expiry date: Jul 7, 2041

Classification

• Technology area (CPC H): Electricity
• CPC primary: H10K71/00
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

An organic light-emitting diode (OLED) deposition system includes two deposition chambers, a transfer chamber between the two deposition chambers, a metrology system having one or more sensors to perform measurements of the workpiece within the transfer chamber, and a control system to cause the system to form an organic light-emitting diode layer stack on the workpiece. Vacuum is maintained around the workpiece while the workpiece is transferred between the two deposition chambers and while retaining the workpiece within the transfer chamber. The control system is configured to cause the two deposition chambers to deposit two layers of organic material onto the workpiece, and to receive a first plurality of measurements of the workpiece in the transfer chamber from the metrology system.