Patent · US Active

Apparatus and methods for alignment of a susceptor

US11859307B2 · kind B2 · utility

0Cited by

4References

20Claims

0Family size

Assignee

Applied Materials, Inc. · US

Inventors

Edric Tong · Sunnyvale, US
James Francis Mack · Palo Alto, US
Paul Brillhart · Pleasanton, US

Key dates

Filing date	Sep 24, 2020
Grant date	Jan 2, 2024
Priority date	—
Expiry date	Dec 10, 2041

Classification

Technology area (CPC H)Electricity
CPC primaryH05B3/68
WIPO fieldSurface technology, coating
WIPO sectorChemistry

Abstract

The embodiments described herein generally relate to a stem assembly for coupling a susceptor to a process chamber. The stem assembly includes a pivot mechanism, a first flexible seal coupled to the pivot mechanism, a second flexible seal coupled to a plate on a first side of the plate, the plate having a second side coupled to the first flexible seal, a housing coupled to the second flexible seal, and a motion assembly adapted to move the housing in an X axis and a Y axis, and position the susceptor angularly relative to an X-Y plane of the process chamber.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.