Method and system for foreline deposition diagnostics and control

US11860973B2 · kind B2 · utility

Assignee

• Applied Materials, Inc. · US

Inventors

• Ala Moradian · Sunnyvale, US
• Martin A. Hilkene · Gilroy, US
• Zuoming ZHU · Sunnyvale, US
• Errol Antonio C. Sanchez · Tracy, US
• Bindusagar Marath Sankarathodi · San Jose, US
• Patricia M. Liu · Saratoga, US
• Surendra Singh SRIVASTAVA · Santa Clara, US

Key dates

• Filing date: Oct 27, 2020
• Grant date: Jan 2, 2024
• Expiry date: Mar 23, 2042

Classification

• Technology area (CPC B): Performing Operations; Transporting
• CPC primary: B08B13/00
• WIPO field: Semiconductors
• WIPO sector: Electrical engineering

Abstract

Systems, apparatus, and methods are disclosed for foreline diagnostics and control. A foreline coupled to a chamber exhaust is instrumented with one or more sensors, in some embodiments placed between the chamber exhaust and an abatement system. The one or more sensors are positioned to measure pressure in the foreline as an indicator of conductance. The sensors are coupled to a trained machine learning model configured to provide a signal when the foreline needs a cleaning cycle or when preventive maintenance should be performed. In some embodiments, the trained machine learning predicts when cleaning or preventive maintenance will be needed.