Inventor · Sunnyvale, CA, US

Zuoming ZHU

19Patents
3h-index
51Co-inventors
59Inventor score

Filing activity: Sep 22, 2010 → Dec 14, 2023

Most-cited inventions

PatentTitleAreaCited byStatus
US10062598B2 Thermal processing susceptor Chemistry; Metallurgy 4 Active
US9768043B2 Quartz upper and lower domes Chemistry; Metallurgy 4 Active
US11177144B2 Wafer spot heating with beam width modulation Performing Operations; Transporting 4 Active
US11021795B2 Multi zone spot heating in epi Electricity 3 Active
US11821088B2 Multi zone spot heating in EPI Electricity 2 Active
US10930543B2 Thermal processing susceptor Chemistry; Metallurgy 2 Active
US9127360B2 Epitaxial chamber with cross flow Electricity 1 Active
US10770319B2 EPI thickness tuning by pulse or profile spot heating Electricity 1 Active
US12163229B2 Multi zone spot heating in EPI Electricity 1 Active
US9842753B2 Absorbing lamphead face Electricity 1 Active
US11860973B2 Method and system for foreline deposition diagnostics and control Performing Operations; Transporting 0 Active
US12196617B2 Temperature profile measurement and synchronized control on substrate and susceptor in an epitaxy chamber Electricity 0 Active
US11261538B1 In-situ temperature mapping for epi chamber Electricity 0 Active
US12334341B2 Chamber body feedthrough for in chamber resistive heating element Electricity 0 Active
US12165934B2 Substrate processing monitoring Electricity 0 Active
US11848226B2 Thermal processing susceptor Chemistry; Metallurgy 0 Active
US12400904B2 Thermal processing susceptor Chemistry; Metallurgy 0 Active
US12428731B2 Flow guide structures and heat shield structures, and related methods, for deposition uniformity and process adjustability Chemistry; Metallurgy 0 Active
US11733081B2 Methods, systems, and apparatus for conducting a calibration operation for a plurality of mass flow controllers (MFCs) of a substrate processing system Physics 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.