Solid-state power amplifiers with cooling capabilities
US11870202B2 · kind B2 · utility
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2References
14Claims
0Family size
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Key dates
| Filing date | Sep 2, 2020 |
| Grant date | Jan 9, 2024 |
| Priority date | — |
| Expiry date | Jul 13, 2042 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03F2200/451
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Methods and apparatus for processing a substrate. For example, a processing chamber can include a power source, an amplifier connected to the power source, comprising at least one of a gallium nitride (GaN) transistor or a gallium arsenide (GaAs) transistor, and configured to amplify a power level of an input signal received from the power source to heat a substrate in a process volume, and a cooling plate configured to receive a coolant to cool the amplifier during operation.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.