Method for providing a wear-resistant material on a body, and composite body
US11874607B2 · kind B2 · utility
1Cited by
1References
20Claims
0Family size
Assignee
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Key dates
| Filing date | Apr 1, 2020 |
| Grant date | Jan 16, 2024 |
| Priority date | — |
| Expiry date | May 30, 2040 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/68757
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A method for providing a wear-resistant material on a body. A composite body that may be obtained by the method. The composite body may be a substrate holder or a reticle clamp for use in a lithographic apparatus. The method includes providing a body made of glass, ceramic or glass-ceramic; providing a wear-resistant material having a hardness of more than 20 GPa; and brazing or laser welding the wear-resistant material to the body.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.