Robot apparatus including dual end effectors with variable pitch and methods

US11883958B2 · kind B2 · utility

Assignee

• Applied Materials, Inc. · US

Inventors

• Karuppasamy Muthukamatchy · Madurai, IN
• Rajkumar Thanu · Santa Clara, US
• Eran Weiss · Ramat Gan, IL
• Jeffrey C. Hudgens · San Francisco, US
• Chandrakant M. Sapkale · Savanuru, IN

Key dates

• Filing date: Jun 7, 2019
• Grant date: Jan 30, 2024
• Expiry date: May 14, 2042

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L21/67754
• WIPO field: Handling
• WIPO sector: Mechanical engineering

Abstract

A robot apparatus may include an upper arm adapted to rotate about a first rotational axis and a forearm rotatably coupled to the upper arm at a second rotational axis. A first wrist member may be rotatably coupled to the forearm at a third rotation axis. A second wrist member may be rotatably coupled to the forearm at the third rotation axis. A first end effector may be coupled to the first wrist member and a second end effector may be coupled to the second wrist member. The first wrist member and the second wrist member may be configured to rotate about the third rotational axis between a first pitch and a second pitch as a function of extension of the robot apparatus. Other apparatus and methods are disclosed.