Patent · US Active

Linear accelerator assembly including flexible high-voltage connection

US11895766B2 · kind B2 · utility

0Cited by

2References

17Claims

0Family size

Assignee

Applied Materials, Inc. · US

Inventors

David Blahnik · Round Rock, US
Charles T. Carlson · Cedar Park, US
Robert Brent Vopat · Austin, US
Frank Sinclair · Quincy, US
Paul J. Murphy · Reading, US
Krag R. Senior · Austin, US

Key dates

Filing date	Oct 15, 2021
Grant date	Feb 6, 2024
Priority date	—
Expiry date	Apr 15, 2042

Classification

Technology area (CPC H)Electricity
CPC primaryH05H2007/222
WIPO fieldChemical engineering
WIPO sectorChemistry

Abstract

Embodiments herein are directed to a linear accelerator assembly for an ion implanter. In some embodiments, a LINAC may include a coil resonator and a plurality of drift tubes coupled to the coil resonator by a set of flexible leads.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.