Inventor · Round Rock, TX, US

David Blahnik

32Patents
4h-index
34Co-inventors
55Inventor score

Filing activity: Apr 6, 2015 → Feb 2, 2024

Most-cited inventions

PatentTitleAreaCited byStatus
US10854483B2 High pressure steam anneal processing apparatus Electricity 14 Active
US10262884B2 Systems, apparatus, and methods for an improved load port Electricity 7 Active
US11355367B2 Robot for simultaneous substrate transfer Electricity 6 Active
US11476135B2 Robot for simultaneous substrate transfer Electricity 4 Active
US10103046B2 Buffer chamber wafer heating mechanism and supporting robot Electricity 3 Active
US11078568B2 Pumping apparatus and method for substrate processing chambers Chemistry; Metallurgy 3 Active
US11596051B2 Resonator, linear accelerator configuration and ion implantation system having toroidal resonator Electricity 2 Active
US10453726B2 Electronic device manufacturing load port apparatus, systems, and methods Electricity 2 Active
US11388810B2 System, apparatus and method for multi-frequency resonator operation in linear accelerator Electricity 2 Active
US11812539B2 Resonator, linear accelerator configuration and ion implantation system having rotating exciter Electricity 2 Active
US10832928B2 Systems, apparatus, and methods for an improved load port Electricity 1 Active
US9899242B2 Device and method for substrate heating during transport Mechanical Engineering; Lighting; Heating 1 Active
US10283379B2 Batch LED heating and cooling chamber or loadlock Electricity 1 Active
US10741432B2 Systems, apparatus, and methods for a load port door opener Electricity 1 Active
US9728430B2 Electrostatic chuck with LED heating Electricity 1 Active
US11094504B2 Resonator coil having an asymmetrical profile Electricity 1 Active
US11315806B2 Batch heating and cooling chamber or loadlock Electricity 1 Active
US12183553B2 Baffle implementation for improving bottom purge gas flow uniformity Electricity 0 Active
US10699930B2 Buffer chamber wafer heating mechanism and supporting robots Electricity 0 Active
US12279359B2 Linear accelerator assembly including flexible high-voltage connection Electricity 0 Active
US11791176B2 Processing chamber with annealing mini-environment Electricity 0 Active
US11895766B2 Linear accelerator assembly including flexible high-voltage connection Electricity 0 Active
US11434569B2 Ground path systems for providing a shorter and symmetrical ground path Electricity 0 Active
US12249522B2 Processing chamber with annealing mini-environment Electricity 0 Active
US12340984B2 Radio frequency power return path Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.