Patent · US Active

Material deposition apparatus having at least one heating assembly and method for pre- and/or post-heating a substrate

US11905589B2 · kind B2 · utility

0Cited by

0References

12Claims

0Family size

Assignee

Applied Materials, Inc. · US

Inventors

Andreas Lopp · Neuses, DE
Stefan Bangert · Lauentheil, DE
Wolfgang BUSCHBECK · Hanau, DE

Key dates

Filing date	Aug 20, 2020
Grant date	Feb 20, 2024
Priority date	—
Expiry date	Aug 20, 2040

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY02E60/10
WIPO fieldSurface technology, coating
WIPO sectorChemistry

Abstract

One or more heating assemblies for a material deposition apparatus for pre-heating a substrate before entering a material deposition area and/or for post-heating the substrate after exiting the material deposition area are described.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.