Inventor · Neuses, DE

Andreas Lopp

10Patents
2h-index
23Co-inventors
50Inventor score

Filing activity: May 4, 2005 → May 27, 2021

Most-cited inventions

PatentTitleAreaCited byStatus
US7531071B2 Magnet arrangement for a planar magnetron Electricity 3 Active
US8137510B2 Coater with a large-area assembly of rotatable magnetrons Electricity 2 Active
US11732345B2 Vapor deposition apparatus and method for coating a substrate in a vacuum chamber Emerging Cross-Sectional Technologies 1 Active
US11905589B2 Material deposition apparatus having at least one heating assembly and method for pre- and/or post-heating a substrate Emerging Cross-Sectional Technologies 0 Active
US9005414B2 Magnet arrangement for a target backing tube, target backing tube including the same, cylindrical target assembly and sputtering system Electricity 0 Active
US7575662B2 Method for operating a sputter cathode with a target Electricity 0 Active
US11718904B2 Mask arrangement for masking a substrate in a processing chamber, apparatus for depositing a layer on a substrate, and method for aligning a mask arrangement for masking a substrate in a processing chamber Electricity 0 Active
US10483465B2 Methods of operating a deposition apparatus, and deposition apparatus Electricity 0 Active
US8869967B2 Dynamic load lock with cellular structure for discrete substrates Electricity 0 Active
US12049691B2 Temperature-controlled shield, material deposition apparatus and method for depositing a material onto a substrate Emerging Cross-Sectional Technologies 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.