Andreas Lopp
10Patents
2h-index
23Co-inventors
50Inventor score
Filing activity: May 4, 2005 → May 27, 2021
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7531071B2 | Magnet arrangement for a planar magnetron | Electricity | 3 | Active |
| US8137510B2 | Coater with a large-area assembly of rotatable magnetrons | Electricity | 2 | Active |
| US11732345B2 | Vapor deposition apparatus and method for coating a substrate in a vacuum chamber | Emerging Cross-Sectional Technologies | 1 | Active |
| US11905589B2 | Material deposition apparatus having at least one heating assembly and method for pre- and/or post-heating a substrate | Emerging Cross-Sectional Technologies | 0 | Active |
| US9005414B2 | Magnet arrangement for a target backing tube, target backing tube including the same, cylindrical target assembly and sputtering system | Electricity | 0 | Active |
| US7575662B2 | Method for operating a sputter cathode with a target | Electricity | 0 | Active |
| US11718904B2 | Mask arrangement for masking a substrate in a processing chamber, apparatus for depositing a layer on a substrate, and method for aligning a mask arrangement for masking a substrate in a processing chamber | Electricity | 0 | Active |
| US10483465B2 | Methods of operating a deposition apparatus, and deposition apparatus | Electricity | 0 | Active |
| US8869967B2 | Dynamic load lock with cellular structure for discrete substrates | Electricity | 0 | Active |
| US12049691B2 | Temperature-controlled shield, material deposition apparatus and method for depositing a material onto a substrate | Emerging Cross-Sectional Technologies | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.