Patent · US Active

Method for operating a particle beam microscope

US11915907B2 · kind B2 · utility

0Cited by

2References

20Claims

0Family size

Assignee

Carl Zeiss Microscopy GmbH · DE

Inventors

Dirk Preikszas · Oberkochen, DE
Simon Diemer · Lauchheim, DE

Key dates

Filing date	Feb 1, 2022
Grant date	Feb 27, 2024
Priority date	—
Expiry date	Jun 1, 2042

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/216
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

A method for operating a particle beam microscopy system includes recording a first particle-microscopic image at a given first focus and varying the excitations of the first deflection device within a given first range. The method also includes changing the focus to a second focus, and determining a second range of excitations of the first deflection device on the basis of the first range, the first excitation, the second excitation and a machine parameter determined in advance. The method further includes recording a second particle-microscopic image at the second focus and varying the excitations of the first deflection device within the determined second range. The second range of excitations is determined so that a region of the object represented in the second particle-microscopic image was also represented in the first particle-microscopic image.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.