Patent · US Active

Method for measuring a sample and microscope implementing the method

US11915908B2 · kind B2 · utility

0Cited by

0References

21Claims

0Family size

Assignee

Carl Zeiss SMT GmbH · DE

Inventors

Eugen Foca · Lauchheim, DE
Amir Avishai · Pleasanton, US
Dmitry Klochkov · Hinterhochstett, DE
Thomas Korb · Schwäbisch Gmünd, DE
Jens Timo Neumann · Shanghai, CN
Keumsil Lee · Palo Alto, US

Key dates

Filing date	Oct 14, 2021
Grant date	Feb 27, 2024
Priority date	—
Expiry date	Oct 14, 2041

Classification

Technology area (CPC H)Electricity
CPC primaryH01J37/28
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

The present invention relates to a method for measuring a sample with a microscope, the method comprising the steps of: measuring a tilt of the sample, correcting an orientation of the sample based on the tilt, and scanning the sample.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.