Reactant vaporizer and related systems and methods

US11926894B2 · kind B2 · utility

Assignee

• ASM IP Holding B.V. · NL

Inventors

• Mohith Verghese · Phoenix, US
• Eric James Shero · Phoenix, US
• Carl Louis White · Gilbert, US
• Kyle Fondurulia · Phoenix, US
• Herbert Terhorst · Amersfoort, NL

Key dates

• Filing date: May 3, 2017
• Grant date: Mar 12, 2024
• Expiry date: Jul 17, 2040

Classification

• Technology area (CPC C): Chemistry; Metallurgy
• CPC primary: C23C16/45544
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

Herein disclosed are systems and methods related to solid source chemical vaporizer vessels and multiple chamber deposition modules. In some embodiments, a solid source chemical vaporizer includes a housing base and a housing lid. Some embodiments also include a first and second tray configured to be housed within the housing base, wherein each tray defines a first serpentine path adapted to hold solid source chemical and allow gas flow thereover. In some embodiments, a multiple chamber deposition module includes first and second vapor phase reaction chambers and a solid source chemical vaporizer vessel to supply each of the first and second vapor phase reaction chambers.