Buffer unit and method for storaging substrate type sensor for measuring of horizontality of a substrate support member provided on a temperature varying atmosphere
US11933808B2 · kind B2 · utility
0Cited by
4References
8Claims
0Family size
Assignee
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Key dates
| Filing date | Dec 29, 2021 |
| Grant date | Mar 19, 2024 |
| Priority date | — |
| Expiry date | Dec 29, 2041 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH02J50/10
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A buffer unit for temporarily storing a substrate includes a housing having a space for storing a substrate therein, one or more slots disposed within the housing for placing a substrate thereon, and a holding unit disposed at a bottom portion of the housing, having a flat and non-inclined top surface, and comprising a built-in wireless charging module. A substrate type sensor is stored at the holding unit.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.