Yong Jun SEO
10Patents
1h-index
49Co-inventors
43Inventor score
Filing activity: Jun 26, 2020 → Oct 14, 2022
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US11756815B2 | Apparatus for and method of monitoring warpage of substrate, substrate treatment apparatus, and substrate-type sensor | Electricity | 2 | Active |
| US11697380B2 | System and method for displaying vehicle driving information | Performing Operations; Transporting | 1 | Active |
| US11495467B2 | Method and apparatus for etching thin layer | Electricity | 0 | Active |
| US12046466B2 | Method and apparatus for treating substrate | Electricity | 0 | Active |
| US12317419B2 | Apparatus for temperature measurement and method of processing substrate | Electricity | 0 | Active |
| US11933808B2 | Buffer unit and method for storaging substrate type sensor for measuring of horizontality of a substrate support member provided on a temperature varying atmosphere | Electricity | 0 | Active |
| US12224189B2 | Substrate type sensor and method of measuring the impact point and the impact force of chemical | Electricity | 0 | Active |
| US11703520B2 | Wafer type sensor unit and data acquisition method using the wafer type sensor unit | Physics | 0 | Active |
| US11923219B2 | Apparatus for treating substrate | Electricity | 0 | Active |
| US12061097B2 | Substrate type sensor for measuring horizontality of substrate support member provided in atmosphere accompanied by temperature change, method for measuring horizontality of substrate support member by using the same, and non-transitory computer readable medium | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.