Simultaneous double-side coating of multilayer graphene pellicle by local thermal processing
US11947256B2 · kind B2 · utility
1Cited by
4References
22Claims
0Family size
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Key dates
| Filing date | Jun 26, 2018 |
| Grant date | Apr 2, 2024 |
| Priority date | — |
| Expiry date | Apr 5, 2039 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70983
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A method of manufacturing a pellicle for a lithographic apparatus, the method including locally heating the pellicle using radiative heating, and depositing coating material simultaneously on both sides of the pellicle, and pellicles manufactured according to this method. Also disclosed is the use of a multilayer graphene pellicle with a double-sided hexagonal boron nitride coating in a lithographic apparatus.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.