Electronic devices comprising a dielectric material, and related systems and methods

US11948992B2 · kind B2 · utility

Assignee

• Micron Technology, Inc. · US

Inventors

• Michael Lindemann · Brandewiede, DE
• Collin Howder · Boise, US
• Yoshiaki Fukuzumi · Yokkaichi, JP
• Richard J. Hill · Boise, US

Key dates

• Filing date: Jan 26, 2021
• Grant date: Apr 2, 2024
• Expiry date: Jun 29, 2041

Classification

• Technology area (CPC H): Electricity
• CPC primary: H10D64/251

Abstract

Electronic devices comprising a doped dielectric material adjacent to a source contact, tiers of alternating conductive materials and dielectric materials adjacent to the doped dielectric material, and pillars extending through the tiers, the doped dielectric material, and the source contact and into the source stack. Related methods and electronic systems are also disclosed.