Vented susceptor
US11961756B2 · kind B2 · utility
1Cited by
118References
14Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 15, 2020 |
| Grant date | Apr 16, 2024 |
| Priority date | — |
| Expiry date | Jun 30, 2040 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/68742
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A susceptor can include a generally circular shape and may include an inner and outer susceptor. The outer susceptor can include a support region having one or more support mechanisms as well as a channel region extending from the region boundary to an outer radial boundary radially inward of an outer edge of the susceptor, the channel region can include a plurality of channels extending radially from the region boundary to the outer radial boundary. The inner susceptor can include a second plurality of channels extending from the inner radial boundary to an edge of the inner susceptor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.