Sam Kim
31Patents
7h-index
38Co-inventors
69Inventor score
Filing activity: Oct 18, 1988 → Jan 3, 2024
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| USD914620S1 | Vented susceptor | General | 303 | Active |
| US6825447B2 | Apparatus and method for uniform substrate heating and contaminate collection | Electricity | 25 | Expired |
| US5007145A | End-locking device for slide fasteners | Emerging Cross-Sectional Technologies | 21 | Expired |
| USD920936S1 | Higher temperature vented susceptor | General | 12 | Active |
| US9039864B2 | Off-center ground return for RF-powered showerhead | Emerging Cross-Sectional Technologies | 11 | Active |
| USD958764S1 | Higher temperature vented susceptor | General | 9 | Active |
| US7007919B2 | Slit valve method and apparatus | Mechanical Engineering; Lighting; Heating | 8 | Expired |
| USD947913S1 | Susceptor shaft | General | 7 | Active |
| USD965044S1 | Susceptor shaft | General | 5 | Active |
| US9966274B2 | Method of generating plasma in remote plasma source and method of fabricating semiconductor device using the same method | Electricity | 3 | Active |
| USD965524S1 | Susceptor support | General | 2 | Active |
| US10233543B2 | Showerhead assembly with multiple fluid delivery zones | Chemistry; Metallurgy | 2 | Active |
| US7845618B2 | Valve door with ball coupling | Mechanical Engineering; Lighting; Heating | 2 | Active |
| US11961756B2 | Vented susceptor | Electricity | 1 | Active |
| US8875657B2 | Balancing RF bridge assembly | Chemistry; Metallurgy | 1 | Active |
| US11488854B2 | Substrate handling device with adjustable joints | Performing Operations; Transporting | 1 | Active |
| US4958481A | Box-cording apparatus | Performing Operations; Transporting | 1 | Expired |
| US9685346B2 | Method of generating plasma in remote plasma source and method of fabricating semiconductor device using the same method | Electricity | 1 | Active |
| US8853098B2 | Substrate support with gas introduction openings | Electricity | 1 | Active |
| USD975665S1 | Susceptor shaft | General | 1 | Active |
| US11828707B2 | Method and apparatus for transmittance measurements of large articles | Physics | 0 | Active |
| US12347644B2 | Susceptor assembly for plasma apparatus | Electricity | 0 | Active |
| US8430961B2 | Source gas flow path control in PECVD system to control a by-product film deposition on inside chamber | Chemistry; Metallurgy | 0 | Active |
| US11837494B2 | Substrate handling device with adjustable joints | Performing Operations; Transporting | 0 | Active |
| US11946137B2 | Runout and wobble measurement fixtures | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.