Electrostatic chuck with ceramic monolithic body
US11967517B2 · kind B2 · utility
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5References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 27, 2020 |
| Grant date | Apr 23, 2024 |
| Priority date | — |
| Expiry date | Dec 27, 2040 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2007
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
An electrostatic chuck for a substrate processing system includes a monolithic body made of ceramic. A plurality of first electrodes are arranged in the monolithic body adjacent to a top surface of the monolithic body and that are configured to selectively receive a chucking signal. A gas channel is formed in the monolithic body and is configured to supply back side gas to the top surface. Coolant channels are formed in the monolithic body and are configured to receive fluid to control a temperature of the monolithic body.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.