Darrell Ehrlich
14Patents
2h-index
35Co-inventors
46Inventor score
Filing activity: Apr 3, 2012 → Feb 18, 2021
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US9058960B2 | Compression member for use in showerhead electrode assembly | Emerging Cross-Sectional Technologies | 5 | Active |
| US10622195B2 | Multi zone gas injection upper electrode system | Electricity | 2 | Active |
| US11594400B2 | Multi zone gas injection upper electrode system | Electricity | 1 | Active |
| US9922804B2 | Compression member for use in showerhead electrode assembly | Emerging Cross-Sectional Technologies | 1 | Active |
| US10186437B2 | Substrate holder having integrated temperature measurement electrical devices | Electricity | 1 | Active |
| US11967517B2 | Electrostatic chuck with ceramic monolithic body | Electricity | 0 | Active |
| US10667379B2 | Connections between laminated heater and heater voltage inputs | Electricity | 0 | Active |
| US12381105B2 | Coolant channel with internal fins for substrate processing pedestals | Electricity | 0 | Active |
| US10764966B2 | Laminated heater with different heater trace materials | Electricity | 0 | Active |
| US11798789B2 | Replaceable and/or collapsible edge ring assemblies for plasma sheath tuning incorporating edge ring positioning and centering features | Electricity | 0 | Active |
| US12340989B2 | Electrostatic edge ring mounting system for substrate processing | Electricity | 0 | Active |
| US10332729B2 | Compression member for use in showerhead electrode assembly | Emerging Cross-Sectional Technologies | 0 | Active |
| US12131890B2 | Chuck for plasma processing chamber | Electricity | 0 | Active |
| US10978323B2 | Substrate holder having integrated temperature measurement electrical devices | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.