Crystal pulling systems having fluid-filled exhaust tubes that extend through the housing
US11976379B2 · kind B2 · utility
0Cited by
3References
10Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 7, 2021 |
| Grant date | May 7, 2024 |
| Priority date | — |
| Expiry date | Oct 7, 2041 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T117/1032
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Crystal pulling systems having a fluid-cooled exhaust tube are disclosed. The fluid-cooled exhaust tube extends through the reactor housing and into the reaction chamber. In some embodiments, the exhaust tube extends through the bottom of the crystal puller housing and through a bottom heat shield within the ingot puller housing.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.