Impedance transformation in radio-frequency-assisted plasma generation
US11984298B2 · kind B2 · utility
3Cited by
40References
21Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 2, 2020 |
| Grant date | May 14, 2024 |
| Priority date | — |
| Expiry date | May 31, 2041 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H7/40
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An apparatus for providing signals to a device may include one or more radio frequency signal generators, and electrically-small transmission line, which coupled signals from the one or more RF signal generators to a fabrication chamber. The apparatus may additionally include a reactive circuit to transform impedance of the electrically-small transmission line from a region of relatively high impedance-sensitivity to region of relatively low impedance-sensitivity.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.