Maintenance methods for polishing systems and articles related thereto
US11986925B2 · kind B2 · utility
0Cited by
7References
13Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 31, 2022 |
| Grant date | May 21, 2024 |
| Priority date | — |
| Expiry date | Dec 30, 2042 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB65D47/42
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Chemically impregnated applicators used to provide hydrophobic surfaces on chemical mechanical polishing system components and related application methods are shown. A method of forming a hydrophobic coating on a surface of a polishing system component includes cleaning the surface of the polishing system component to remove a polishing fluid residue therefrom and applying a hydrophobicity causing chemical solution to the surface of the polishing system component.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.