Eco-efficiency (sustainability) dashboard for semiconductor manufacturing

US12001197B2 · kind B2 · utility

Assignee

• Applied Materials, Inc. · US

Inventors

• Ala Moradian · Sunnyvale, US
• Elizabeth Neville · Palo Alto, US
• Umesh M. Kelkar · Santa Clara, US
• Mark Denome · San Jose, US
• Prashanth Kothnur · San Jose, US
• Karthik Ramanathan · Survanagiri, IN
• Kartik Shah · Saratoga, US
• Orlando Trejo · Santa Clara, US
• Sergey Meirovich · Austin, US

Key dates

• Filing date: Apr 14, 2021
• Grant date: Jun 4, 2024
• Expiry date: Apr 14, 2041

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L21/67276
• WIPO field: Control
• WIPO sector: Instruments

Abstract

A method including receiving, by a processing device, a first selection of at least one of a first fabrication process or first manufacturing equipment to perform manufacturing operations of the first fabrication process. The method can further include inputting the first selection into a digital replica of the first manufacturing equipment wherein the digital replica outputs physical conditions of the first fabrication process. The method may further include determining environmental resource usage data indicative of a first environmental resource consumption of the first fabrication process run on the first manufacturing equipment based on the physical conditions of the first fabrication process. The processing device may further determine a modification to the first fabrication process that reduces the environmental resource consumption of the first fabrication process run on the first manufacturing equipment. The method can further include performing at least one of applying the modification to the first fabrication.