Method for detecting the splitting of a substrate weakened by implanting atomic species
US12002697B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 22, 2019 |
| Grant date | Jun 4, 2024 |
| Priority date | — |
| Expiry date | May 1, 2040 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L22/20
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method for monitoring a heat treatment applied to a substrate comprising a weakened zone formed by implanting atomic species for splitting the substrate along the weakened zone, the substrate being arranged in a heating chamber, the method comprising recording sound in the interior or in the vicinity of the heating chamber and detecting, in the recording, a sound emitted by the substrate during the splitting thereof along the weakened zone. A device for the heat treatment of a batch of substrates comprises an annealing furnace comprising a heating chamber intended to receive the batch, at least one microphone configured to record sounds in the interior or in the vicinity of the heating chamber, and a processing system configured to detect, in an audio recording produced by the microphone, a sound emitted when a substrate splits.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.