Methods and systems of capturing transient thermal responses of regions of crystal pullers
US12018400B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 15, 2022 |
| Grant date | Jun 25, 2024 |
| Priority date | — |
| Expiry date | Mar 9, 2042 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC30B15/20
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A system for producing a silicon ingot, the system includes a crystal puller, a pyrometer, an infrared (IR) camera, and a controller. The crystal puller includes a hot zone having one or more components therein, and in which a silicon ingot may be pulled. The pyrometer is positioned to view a region of interest within the hot zone. The IR camera is positioned to view one or more additional regions of interest within the hot zone. The controller is connected to the crystal puller, the pyrometer, and the IR camera. The controller is programmed to control the crystal puller to produce a silicon ingot, receive temperature data of the region of interest within the hot zone from the pyrometer while producing the silicon ingot, and receive IR images of the one or more additional regions of interest from the IR camera while producing the silicon ingot.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.