Lift pin assembly

US12020977B2 · kind B2 · utility

Assignee

• Applied Materials, Inc. · US

Inventors

• Alexander SULYMAN · San Francisco, US
• Anwar Husain · Pleasanton, US
• Timothy Joseph Franklin · Campbell, US
• Carlaton WONG · Sunnyvale, US
• Xue Yang Chang · San Jose, US

Key dates

• Filing date: Mar 7, 2022
• Grant date: Jun 25, 2024
• Expiry date: Nov 2, 2042

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L21/68785
• WIPO field: Semiconductors
• WIPO sector: Electrical engineering

Abstract

Methods and apparatus for lift pin assemblies for substrate processing chambers are provided. In some embodiments, a lift pin assembly includes a lift pin comprising a shaft, a head, and a coupling end, the head configured to rest against an electrostatic chuck; an upper guide comprising a top end, a bottom end, and a first opening extending from the top end to the bottom end, wherein the shaft is disposed and axially movable through the first opening; a lower guide comprising a top end, a bottom end, and a second opening and a third opening extending from the top end to the bottom end, wherein the third opening is larger than the second opening, and wherein the shaft is disposed and axially movable through the second opening and the third opening; and a biasing mechanism coupled to the shaft and configured to bias the lift pin against the electrostatic chuck.