Post-chemical mechanical polishing brush cleaning box
US12023779B2 · kind B2 · utility
0Cited by
6References
15Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jul 14, 2021 |
| Grant date | Jul 2, 2024 |
| Priority date | — |
| Expiry date | May 4, 2042 |
Classification
- Technology area (CPC A)Human Necessities
- CPC primaryA46B2200/3073
- WIPO fieldOther consumer goods
- WIPO sectorOther fields
Abstract
Embodiments provided herein include a system and method for cleaning a first surface of a substrate using a brush carousel assembly. In one embodiment, the brush carousel assembly includes one or more rotatable brush mounting assemblies coupled to a rotatable carriage, having a carriage support structure configured to rotate about a carriage axis. The brush carousel assembly further includes a second brush mounting assembly disposed a second radial distance from the carriage axis, and coupled to the support structure of the carriage that includes the one or more rotatable support members.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.