Inventor · Santa Clara, CA, US

Gary Lam

8Patents
4h-index
36Co-inventors
57Inventor score

Filing activity: Dec 18, 2001 → Jul 14, 2021

Most-cited inventions

PatentTitleAreaCited byStatus
US9005999B2 Temperature control of chemical mechanical polishing Electricity 16 Active
US11132602B1 Efficient online training for machine learning Physics 9 Active
US6780773B2 Method of chemical mechanical polishing with high throughput and low dishing Electricity 7 Expired
US6790768B2 Methods and apparatus for polishing substrates comprising conductive and dielectric materials with reduced topographical defects Electricity 6 Expired
US6960521B2 Method and apparatus for polishing metal and dielectric substrates Electricity 3 Expired
US8930013B2 Adaptively tracking spectrum features for endpoint detection Performing Operations; Transporting 2 Active
US7232761B2 Method of chemical mechanical polishing with high throughput and low dishing Electricity 0 Expired
US12023779B2 Post-chemical mechanical polishing brush cleaning box Human Necessities 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.