Leak detection for gas sticks
US12031885B2 · kind B2 · utility
0Cited by
2References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 27, 2023 |
| Grant date | Jul 9, 2024 |
| Priority date | — |
| Expiry date | Mar 27, 2043 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67253
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method and system for monitoring and detecting a gas leak in a gas stick assembly is provided. The method includes measuring a pressure in a mass flow controller of the gas stick assembly at different time points and determining whether there is a difference in pressure at the different time points that exceeds a difference threshold.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.