Systems and methods for inspection stations
US12040205B2 · kind B2 · utility
0Cited by
7References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 19, 2020 |
| Grant date | Jul 16, 2024 |
| Priority date | — |
| Expiry date | Oct 19, 2040 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH04N25/71
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
In an embodiment, a workstation includes: a processing chamber configured to process a workpiece; a load port configured to interface with an environment external to the workstation; a robotic arm configured to transfer the workpiece between the load port and the processing chamber; and a defect sensor configured to detect a defect along a surface of the workpiece when transferred between the load port and the processing chamber.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.