Inventor · Hsinchu, TW

Che-Fu Chen

30Patents
2h-index
20Co-inventors
49Inventor score

Filing activity: Jan 12, 2018 → May 15, 2024

Most-cited inventions

PatentTitleAreaCited byStatus
US11004713B2 Robot arm device and method for transferring wafer Physics 3 Active
US11177183B2 Thickness measurement system and method Electricity 2 Active
US10283393B1 Wafer carrying fork, semiconductor device manufacturing system, and wafer transporting method Electricity 2 Active
US10978333B2 Systems and methods for robotic arm sensing Electricity 1 Active
US11600517B2 Screwless semiconductor processing chambers Electricity 1 Active
US12027594B2 Method of manufacturing a semiconductor device and a semiconductor device Electricity 1 Active
US11101163B2 Systems and methods for automated robotic arm sensing Electricity 1 Active
US11756840B2 Reflectance measurement system and method thereof Physics 1 Active
US11211232B2 Methods for cleaning semiconductor device manufacturing apparatus Human Necessities 1 Active
US11443966B2 Semiconductor processing flow field control apparatus and method Electricity 1 Active
US12420314B2 Semiconductor cleaning apparatus and method Electricity 0 Active
US12165909B2 Screwless semiconductor processing chambers Electricity 0 Active
US11779949B2 Semiconductor process chamber contamination prevention system Electricity 0 Active
US12090503B2 Semiconductor process chamber contamination prevention system Electricity 0 Active
US12414347B2 Method of manufacturing a semiconductor device and a semiconductor device Electricity 0 Active
US10811290B2 Systems and methods for inspection stations Electricity 0 Active
US12068398B2 Fin field-effect transistor with void and method of forming the same Electricity 0 Active
US11139149B2 Gas injector Electricity 0 Active
US11664260B2 Systems and methods for orientator based wafer defect sensing Electricity 0 Active
US11837484B2 Robot arm device and method for transferring wafer Physics 0 Active
US11177150B2 Cluster tool and method using the same Electricity 0 Active
US11664265B2 Systems and methods for robotic arm sensing Electricity 0 Active
US11521884B2 Electrostatic chuck sidewall gas curtain Electricity 0 Active
US11710620B2 Semiconductor process chamber with heat pipe Electricity 0 Active
US12040205B2 Systems and methods for inspection stations Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.