Method of manufacturing devices
US12044980B2 · kind B2 · utility
1Cited by
3References
20Claims
0Family size
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Key dates
| Filing date | Oct 30, 2019 |
| Grant date | Jul 23, 2024 |
| Priority date | — |
| Expiry date | Jan 31, 2041 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70525
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A method for analyzing a process, the method including obtaining a multi-dimensional probability density function representing an expected distribution of values for a plurality of process parameters; obtaining a performance function relating values of the process parameters to a performance metric of the process; and using the performance function to map the probability density function to a performance probability function having the process parameters as arguments.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.