Patent · US Active

Temperature-controlled shield, material deposition apparatus and method for depositing a material onto a substrate

US12049691B2 · kind B2 · utility

0Cited by

1References

5Claims

0Family size

Assignee

Applied Materials, Inc. · US

Inventors

Andreas Lopp · Neuses, DE
Stefan Bangert · Lauentheil, DE

Key dates

Filing date	May 27, 2021
Grant date	Jul 30, 2024
Priority date	—
Expiry date	May 27, 2041

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY02E60/10
WIPO fieldSurface technology, coating
WIPO sectorChemistry

Abstract

A temperature-controlled shield for an evaporation source is described. The temperature-controlled shield is configured to provide a pre-heating zone or a post-cooling zone.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.