Metrology slot plates
US12057333B2 · kind B2 · utility
0Cited by
7References
3Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 3, 2021 |
| Grant date | Aug 6, 2024 |
| Priority date | — |
| Expiry date | Jul 14, 2042 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67103
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Metrology slot plates, processing chamber lids and processing chambers having metrology slot plates are described. Each of the metrology slot plates independently comprises one or more of a plate blank, a reflectometer, a capacitance sensor, a gas flow meter, a manometer, a pyrometer, a distance sensor (laser) or an emissometer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.