Systems and methods for adaptive troubleshooting of semiconductor manufacturing equipment
US12061458B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 27, 2021 |
| Grant date | Aug 13, 2024 |
| Priority date | — |
| Expiry date | Sep 29, 2042 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06N20/20
- WIPO fieldComputer technology
- WIPO sectorElectrical engineering
Abstract
A system includes a processing device, operatively coupled to the memory device, to perform operations comprising obtaining a plurality of sensor values associated with a deposition process performed, according to a recipe, in a process chamber to deposit film on a surface of a substrate; generating a manufacturing data graph based on the plurality of sensor values; receiving, via a user interface, a selection of a data point on the manufacturing graph; receiving failure data associated with the data point; and storing, in a data structure, the failure data to be accessible via the user interface presenting the manufacturing data graph.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.