Trolley and method for supporting component of substrate processing apparatus
US12065182B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 15, 2021 |
| Grant date | Aug 20, 2024 |
| Priority date | — |
| Expiry date | Jul 1, 2042 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB62B2206/02
- WIPO fieldTransport
- WIPO sectorMechanical engineering
Abstract
A trolley includes a trolley body which in turn includes a wheel that is freely movable on a floor, and a first support that supports a component of a substrate processing apparatus that slides in a lateral direction and is pulled out to an outside of the substrate processing apparatus. The trolley also includes a second support that is connected to the trolley body so as to be freely movable between a first position where a width of the trolley in the lateral direction is a first length and a second position where the width in the lateral direction is a second length longer than the first length, and configured to support the component at the second position together with the first support.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.