Patent · US Active

Increased number of load ports on factory interface with robot that moves on track

US12076854B2 · kind B2 · utility

0Cited by

2References

20Claims

0Family size

Assignee

Applied Materials, Inc. · US

Inventors

Paul B. Reuter · Austin, US
Sushant S. Koshti · Sunnyvale, US
Maureen Frances Breiling · Campbell, US

Key dates

Filing date	Mar 10, 2022
Grant date	Sep 3, 2024
Priority date	—
Expiry date	Jan 2, 2043

Classification

Technology area (CPC G)Physics
CPC primaryG05B2219/45031
WIPO fieldHandling
WIPO sectorMechanical engineering

Abstract

A factory interface includes a housing, a front surface of the housing having multiple load ports, a robot having an arm and an end effector, and a track attached to a floor within the housing. The robot is adapted to move horizontally along the track to multiple positions from which the arm can reach the end effector of the robot into a front opening unified pod attached to any of the multiple load ports.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.