Systems and methods for in-situ measurement of sheet resistance on substrates
US12105039B2 · kind B2 · utility
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3References
19Claims
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Key dates
| Filing date | Sep 29, 2020 |
| Grant date | Oct 1, 2024 |
| Priority date | — |
| Expiry date | Mar 5, 2041 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N33/20
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
In some examples, a Vacuum Pre-treatment Module (VPM) metrology system is provided for measuring a sheet resistance of a layer on a substrate. The system may comprise an eddy sensor including a sender sensor and a receiver sensor defining a gap between them for accepting an edge of a substrate to be tested. A sensor controller receives measurement signals from the eddy sensor. A data processor processes the measurement signals and generates sheet resistance values for the layer on the substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.