Accelerating preventative maintenance recovery and recipe optimizing using machine-learning based algorithm
US12106984B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Nov 23, 2021 |
| Grant date | Oct 1, 2024 |
| Priority date | — |
| Expiry date | Nov 23, 2041 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG05B2219/32368
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
A method for determining processing chamber conditions using sensor data and a machine learning model is provided. The method includes receiving, by a processing device, sensor data that include chamber data indicating a state of an environment of a processing chamber processing a substrate according to a set of process parameters of a current process. The sensor data further include spectral data indicating optical emission spectra (OES) measurements of a plasma disposed within the processing chamber. The method further includes using the sensor data as input to a machine learning model and obtaining one or more outputs that indicate one or more chamber condition metrics. The method further includes determining a recovery status of a processing chamber based on the one or more chamber condition metrics. The method further includes causing a modification to a performance of the processing chamber based on the recovery status of the processing chamber.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.