Inventor · San Jose, CA, US

Pengyu Han

13Patents

2h-index

23Co-inventors

50Inventor score

Filing activity: Aug 12, 2010 → Mar 25, 2024

Most-cited inventions

Patent	Title	Area	Cited by	Status
US11421977B2	Eliminating internal reflections in an interferometric endpoint detection system	Electricity	3	Active
US11709477B2	Autonomous substrate processing system	Physics	2	Active
US12265377B2	Autonomous substrate processing system	Physics	1	Active
US11719952B2	Adjustable achromatic collimator assembly for endpoint detection systems	Physics	1	Active
US8299435B2	Tunable broadband anti-relfection apparatus	Physics	1	Active
US12385778B2	Hyper-spectral multi-spot optical reflectometer	Electricity	0	Active
US12106984B2	Accelerating preventative maintenance recovery and recipe optimizing using machine-learning based algorithm	Physics	0	Active
US11901203B2	Substrate process endpoint detection using machine learning	Physics	0	Active
US11965798B2	Endpoint detection system for enhanced spectral data collection	Physics	0	Active
US12385803B2	Endpoint detection system for enhanced spectral data collection	Physics	0	Active
US12066639B2	Adjustable achromatic collimator assembly for endpoint detection systems	Physics	0	Active
US12236077B2	Methods and mechanisms for generating virtual knobs for model performance tuning	Electricity	0	Active
US8338802B2	Terahertz radiation anti-reflection devices and methods for handling terahertz radiation	Emerging Cross-Sectional Technologies	0	Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.