Virtual measurement of conditions proximate to a substrate with physics-informed compressed sensing
US12131105B2 · kind B2 · utility
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17Claims
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Key dates
| Filing date | Sep 15, 2021 |
| Grant date | Oct 29, 2024 |
| Priority date | — |
| Expiry date | Jun 11, 2043 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06F2119/18
- WIPO fieldComputer technology
- WIPO sectorElectrical engineering
Abstract
A method includes measuring a subset of property values within a manufacturing chamber during a process performed on a substrate within the manufacturing chamber. The method further includes determining property values in the manufacturing chamber at locations removed from the locations the measurements are taken. The method further includes performing a corrective action based on the determined properties.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.