Patent · US Active

Filter isolation for equipment front end module

US12140339B2 · kind B2 · utility

0Cited by

1References

20Claims

0Family size

Assignee

Applied Materials, Inc. · US

Inventors

James Christopher Hansen · Sunnyvale, US
Steven Trey Tindel · Austin, US
Paul B. Reuter · Austin, US

Key dates

Filing date	Oct 13, 2022
Grant date	Nov 12, 2024
Priority date	—
Expiry date	Jan 28, 2043

Classification

Technology area (CPC H)Electricity
CPC primaryH01L21/67389
WIPO fieldChemical engineering
WIPO sectorChemistry

Abstract

Disclosed herein are systems and methods for reducing startup time of an equipment front end module (EFEM). The EFEM may include an EFEM chamber formed between a plurality of walls, an upper plenum above the EFEM chamber, the upper plenum in fluid communication with the EFEM chamber, a plurality of ducts that provide a return gas flow path enabling recirculation of gas from the EFEM chamber to the upper plenum, one or more filters that separate the upper plenum from the EFEM chamber, an isolation gate configured to block the return gas flow path responsive to the isolation gate being actuated to a closed position to isolate the one or more filters from an ambient environment responsive to a gas being flowed through the upper plenum when the EFEM chamber is opened to the ambient environment.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.