Patent · US Active

Methods and evaluation devices for analyzing three-dimensional data sets representing devices

US12148139B2 · kind B2 · utility

0Cited by

3References

20Claims

0Family size

Assignee

Carl Zeiss SMT GmbH · DE

Inventors

Ramani Pichumani · Palo Alto, US
Thomas Korb · Schwäbisch Gmünd, DE
Dmitry Klochkov · Hinterhochstett, DE
Jens Timo Neumann · Shanghai, CN

Key dates

Filing date	Nov 29, 2021
Grant date	Nov 19, 2024
Priority date	—
Expiry date	Mar 10, 2043

Classification

Technology area (CPC G)Physics
CPC primaryG06T2207/30172
WIPO fieldComputer technology
WIPO sectorElectrical engineering

Abstract

Methods and evaluation devices for evaluating 3D data of a device under inspection are provided. A first machine learning logic detects target objects, and a second machine learning logic provides a voxel segmentation for the target objects. Based on the segmented voxels, a transformation to feature space is performed to obtain measurement results.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.