Method of forming integrated fan-out packages with built-in heat sink
US12148661B2 · kind B2 · utility
0Cited by
26References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 21, 2022 |
| Grant date | Nov 19, 2024 |
| Priority date | — |
| Expiry date | Nov 20, 2042 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/181
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A method of forming a semiconductor device includes attaching a metal foil to a carrier, the metal foil being pre-made prior to attaching the metal foil; forming a conductive pillar on a first side of the metal foil distal the carrier; attaching a semiconductor die to the first side of the metal foil; forming a molding material around the semiconductor die and the conductive pillar; and forming a redistribution structure over the molding material.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.